Looking for a reliable way to hold semiconductor wafers without slipping or damage? The Matsusada HECD-7.5B1.22 7.5kV Bipolar 2CH Electrostatic Chuck Power Supply gives you precise high-voltage control so your wafer stays exactly where you need it. Many labs struggle with unstable voltage that causes uneven clamping and lost time. This unit solves that problem with fast polarity switching and stable output, letting you focus on the process, not the power source.
Matsusada HECD-7.5B1.22 7.5kV Bipolar 2CH Electrostatic Chuck Power Supply
When a chuck cannot keep a wafer flat, the entire manufacturing step can fail, leading to scrap and extra cost. This issue matters most to users who need repeatable results in semiconductor processing. The Matsusada supply removes the uncertainty by delivering a bipolar voltage from 0.5 kV to 7.5 kV with a response time of about 90 ms. Two independent channels let you run two chucks at once, increasing throughput while keeping each voltage stable.
Key Features
- Output voltage range 0.5 kV to 7.5 kV (bipolar).
- Output current 1.2 mA per channel.
- Two independent high-voltage channels.
- Approx. 10 W class power output.
- Response time ~90 ms for the 7.5 kV model.
- Chuck / de-chuck polarity switching control.
- Optional wafer sensing function for monitoring.
- LAN, USB, and RS-232C digital interfaces.
- Built-in 13.56 MHz RF filter.
- Benchtop half-rack compact form factor.
Specifications
| General Information |
|
| Model |
HECD-7.5B1.2×2 |
| Series |
HECD Series |
| Manufacturer |
Matsusada Precision |
| Product Type |
Electrostatic Chuck High Voltage Power Supply |
| Output Specifications |
|
| Output Voltage |
0.5 kV to ±7.5 kV (bipolar output) |
| Output Current |
1.2 mA (per channel) |
| Output Channels |
2 channels (2CH independent output) |
| Output Power |
Approx. class 10 W (series range 4–10 W) |
| Polarity |
Bipolar (positive/negative switching) |
| Response Time |
~90 ms (typical for 7.5 kV model) |
| Control & Monitoring |
|
| Control Function |
Chuck / De-chuck polarity switching |
| Monitoring |
Wafer sensing function (optional feature in series) |
| Interfaces & Communication |
|
| Interface |
LAN / USB / RS-232C (digital interface standard) |
| RF Filter |
Built-in RF filter (13.56 MHz support) |
| Power & Form Factor |
|
| Input Voltage |
AC 100–240 V |
| Form Factor |
Benchtop half-rack compact design |
| Application & Features |
|
| Application |
Semiconductor wafer electrostatic chuck systems |
| Features |
Fast polarity reversal, high stability HV output |
